I-Optical interference thickness gauge

Izinhlelo zokusebenza

Linganisa ifilimu yokubona ifilimu, isicwecwana selanga, ingilazi ezacile kakhulu, itheyiphu enamathelayo, ifilimu yeMylar, i-OCA yokunamathisela optical, ne-photoresist njll.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Uma isetshenziswa enqubweni yokunamathelisa, lezi zinsiza zingabekwa ngemuva kwethangi lokunamathisela naphambi kukahhavini, ukuze kuthathwe isilinganiso se-inthanethi sokuqina kwe-gluing, kanye nesilinganiso esiku-inthanethi sokushunqa kwefilimu ekhishwayo, ngokunemba okuphezulu kakhulu kanye nezicelo ezibanzi, ikakhulukazi ezifanele ukukalwa kogqinsi kwento enezingqimba eziningi esobala enobukhulu obudingekayo kuze kufike ezingeni le-nanometer.

Ukusebenza komkhiqizo/amapharamitha

Ububanzi besilinganiso: 0.1 μm ~ 100 μm

Ukunemba kokulinganisa: 0.4%

Ukuphindaphinda kokulinganisa: ±0.4 nm (3σ)

Ububanzi be-wavelength: 380 nm ~ 1100 nm

Isikhathi sokuphendula: 5~500 ms

Indawo yokulinganisa: 1 mm ~ 30 mm

Ukuphindaphinda kwesilinganiso sokuskena esiguqukayo: 10 nm


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